Fluence (ions cm^-2)	Oxygen Concentration (%)	Silicon Concentration (%)	Magnesium Concentration (%)	Carbon Concentration (%)
0	61.07093	12.27469	18.40653	8.24785
5.18112E15	62.48492	14.22734	20.46035	2.8274
1.03622E16	61.87798	15.26679	20.35523	2.5
2.07245E16	62.31344	16.43897	19.62904	1.61854
4.1449E16	61.83413	17.47264	18.70494	1.98829
8.28979E16	61.88853	18.31604	17.71866	2.07678
1.65796E17	61.25909	19.7887	17.1593	1.79291
3.10867E17	61.0217	19.12758	18.42824	1.42247
